JPH03109676U - - Google Patents
Info
- Publication number
- JPH03109676U JPH03109676U JP1828990U JP1828990U JPH03109676U JP H03109676 U JPH03109676 U JP H03109676U JP 1828990 U JP1828990 U JP 1828990U JP 1828990 U JP1828990 U JP 1828990U JP H03109676 U JPH03109676 U JP H03109676U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- fin
- back surface
- air flow
- substrate holder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 11
- 238000004528 spin coating Methods 0.000 claims description 4
- 239000007788 liquid Substances 0.000 claims 1
- 230000002093 peripheral effect Effects 0.000 claims 1
- 238000006243 chemical reaction Methods 0.000 description 1
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1828990U JP2503999Y2 (ja) | 1990-02-27 | 1990-02-27 | スピンコ―テイング装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1828990U JP2503999Y2 (ja) | 1990-02-27 | 1990-02-27 | スピンコ―テイング装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH03109676U true JPH03109676U (en]) | 1991-11-11 |
| JP2503999Y2 JP2503999Y2 (ja) | 1996-07-03 |
Family
ID=31521452
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1828990U Expired - Lifetime JP2503999Y2 (ja) | 1990-02-27 | 1990-02-27 | スピンコ―テイング装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2503999Y2 (en]) |
-
1990
- 1990-02-27 JP JP1828990U patent/JP2503999Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JP2503999Y2 (ja) | 1996-07-03 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |